Display
Provides AMHS Solution optimized for LCD / OLED production process
Stocker
Use
Inter-process material transport system with cassette storage and transport function
Features
- Fast, Efficient Storage and Retrieval
- AGV/MGV/OHS Compatible I/O Port
- SECS/HSMS/GEM Compatible
- Contact-less Power Supply
Specification
- PayloadMax. 2,000kg
- SpeedMax. 210m/min
- Forking Time7 sec ~ 12 sec
- CleanlinessClass 10@0.1㎛(Anti-Particle Design)
OHCV (Curved)
Use
Material equipment that transports cassettes between stockers through the top for efficient space utilization
Features
- Application of Curved Rail
- educing Number of Carriage
- Short Cycle Time
- Easy to Configure Layout
Specification
- PayloadMax. 2,000kg
- SpeedMax. 180m/min
- Power SupplyContact-less Power Supply
- Cleanliness Cleanliness Class 10@0.1㎛(Anti-Particle Design)
OHT (Overhead Hoist Transport)
Use
Material equipment that transports goods directly to the process equipment in long distance zones and areas with large amounts of transport, installed under the ceiling for efficient space utilization
Features
- Direct Interface With Stocker To Process
- Equipment or Buffers
- Rail TypeSingle Rail
- Routing DeviceTurn Table/Rail Shifter
- Use For Cell To Module Transfer
Specification
- PayloadMax. 600kg
- Traveling VelocityMax. 180m/min
- Hoisting Speed Contact-less Power Supply
- Gripper Base
RGV (Rail Guided Vehicle)
Use
Unmanned transport equipment that transports cassettes between process equipment, stockers, and buffers along rails
Features
- Excellent Substitute for AGV System
- Direct Interface with Process Equip. or Buffers
Specification
- PayloadMax. 2,000kg
- SpeedMax. 210m/min
- HForking Time 7 sec ~ 12 sec
- Cleanliness Class 10@0.1㎛(Anti-Particle Design)
AGV (Automated Guided Vehicle)
Use
Unmanned conveyance equipment that conveys cassettes between process equipment, stockers, and buffers
Features
- Excellent & Flexible Delivery System
- Direct Interface with Process Equip. or Buffers
- Steering Wheel Drive
- Auto Charging System
- SCARA or Slide Fork
Specification
- Payload100 ~ 1,500kg
- SpeedMax. 60m/min
- Load Time15 sec ~ 32 sec
- CleanlinessFab -Class 10@0.1㎛(Anti-Particle Design)
Pkg -Class 1000@0.5㎛(Anti-Particle Design)
Clean Lift
Use
Equipment that vertically conveys cassettes at inter- or intra-layer level during the FPD process
Features
- AGV/RGV/OHCV/STK Compatible I/O Port
- High Efficiency
- Optimize Safety Interlock
Specification
- PayloadMax. 3,000kg
- SpeedMax. 120m/min
- StrokeMax. 97m
- CleanlinessClass 10@0.1㎛(Anti-Particle Design)
OHS (Over Head Shuttle)
Use
Equipment that transports cassettes in long distance zones and areas with large amounts of transport, installed under the ceiling for efficient space utilization
Features
- Minimum Curve Radius
- Compatible with High Cleanliness
- High Efficiency
- Compact and Slim Design
Specification
- PayloadMax. 2,000kg
- Traveling VelocityMax. 210m/min(curve 45m/min)
- CleanlinessClass 10 @0.1㎛(with Exhaust Filter)